MCAM TIVAR® H.O.T. UHMW-PE

Semiconductor Wet Process Solutions Global leader in providing ultrapure semi-finished rod sheet tube solutions for eve ry need in the semiconductor industry Typical Process Tools FEOL Clean BEOL Clean PVD Sputtering Plating Tools Wet Bench Wafer Handling Components Wet Process Materials Proteus PP Semitron PP Ertalyte PET-P Ketron 1000 PEEK 1000 PMP Ketron CA30 PEEK Techtron PPS mcam.com Structural Chamber MCAMconnect contactmcam.com nc ara pe Ap Proteus PP 210 dense white Semitron PP 210 white 1000 PMP 155 transparent Ertalyte PET-P 240 dense white 250 beige P urity Techtron PPS Ketron CA30 PEEK 518 black C hemical resistance Ketron 1000 PEEK 320 tan Key Con siderations C orrosion resistance F latness Strength wear Dimensional strength rod sheet Av a Sh ilabl ap e es e i ps 64 T2 HD Material R D i me l a t i e ve S t an s i o bil nal ity Wafer Handling Component Features tube Typical Applications S pin discs chucks W afer motion gears Shower heads W afer grabbers P ins screws Functional Chemical Compatibility 1000 PMP Strong Acids Weak Acids Strong Base Weak Base Salts Halogens Aliphatic hydrocarbon Solvents Aromatic hydrocarbon Chlorinated hydrocarbon Ketones Amines Alcohols Esters Aldehydes Phenoles Tests 73F 0 0 0 Semitron PP 0 0 0 Ketron 1000 PEEK 0 0 - Not Acceptable Service Techtron PPS 0 0 - Ketron CA30 PEEK 0 Ertalyte PET-P 0 0 0 - 0 Limited Service Acceptable Service Semitron PP Semitron PP is polypropylene plate developed specifically for demanding Wet Process Semiconductor applications that requires a high level of dimensional stability. Key Benefits M inimizes center line porosity common with thicker plates 2 up Minimal Center Line Porosity M itsubishi Chemical Advanced Materials has developed proprietary processing methods to minimize the high stress center line porosity that is common with standard polypropylene T he plates ranging fro

m 2 to 5 thickness are manufactured to the highest standards for use in the Semiconductor Wet Process Industry D elivers Ultra-Clean plate to minimize risk of surface contaminants Lowers overall cost by delivering lower stress plate Semitron PP vs. Standard PP Lower is better 0.35 Semitron PP Standard PP Center Point Deflection 0.30 0.25 0.20 0.15 0.10 0.05 0 1.00 1.25 1.50 Plate Thickness inches 2.00 Data source Mitsubishi Chemical Advanced Materials Lab Semitron PP Plate Standard PP Plate Lower internal stress allows for accelerated fabrication cycles through faster speeds feeds as well as reducing or eliminating the need to anneal. Proteus PP Semitron PP Ertalyte PET-P 1000 PMP Techtron PPS Ketron 1000 PEEK Mechanical Properties Material Comparison Guide Specific Gravity D792 0.91 0.92 1.41 0.83 1.35 1.35 Tensile Modulus psi D638 190000 150000 460000 240000 500000 63000 Flexural Modulus psi D790 195000 185000 490000 195000 575000 600000 Tensile Elongation D638 14 8 20 50 15 40 CLTE in.in.F X 10-5 E-831 TMA - 6.0 3.3 6.5 2.8 2.6 Hardness Rockwell D785 - R113 M93 R83 M95 M100 Moisture Absorption 24hrs 73F D570 0.01 0.01 0.07 0.01 0.10 0.10 D256 Type A 1.2 1.0 0.5 0.5 0.6 0.6 D648 205 300 240 155 250 320 - 180 180 210 300 425 480 Thermal Prop. Izod Notched Heat Deflection Temperature 264psi F Continuous Service Temperature Proteus LF Semitron PP Sizes Available Semitron PP Proteus LF Thickness in. Plate Size in. 0.250 610 x 1220 1220 x 3050 24 x 48 48 x 120 0.375 610 x 1220 1220 x 3050 24 x 48 48 x 120 0.500 610 x 1220 1220 x 3050 24 x 48 48 x 120 0.625 610 x 1220 1220 x 3050 24 x 48 48 x 120 0.750 610 x 1220 1220 x 3050 24 x 48 48 x 120 1.000 610 x 1220 1220 x 3050 24 x 48 48 x 120 1.250 610 x 1220 1220 x 3050 24 x 48 48 x 120 1.500 610 x 1220 1220 x 3050 24 x 48 48 x 120 2.000 610 x 1220 1220 x 3050 24 x 48 48 x 120 2.250 610 x 1220 1220 x 3050 24 x 48 48 x 120 2.500 610 x 1220 1220 x 3050 24 x 48 48 x 120 3.000 610 x 1220 1220 x 3050 24 x 48 48 x 120 4.00

0 610 x 1220 1220 x 3050 24 x 48 48 x 120 5.000 610 x 1220 1220 x 3050 24 x 48 48 x 120 mcam.com Distributed by Plate Size mm MCAMconnect contactmcam.com All statements technical information and recommendations contained in this publication are presented in good faith and are as a rule based upon tests and such tests are believed to be reliable and practical field experience. The reader however is cautioned that Mitsubishi Chemical Advanced Materials does not guarantee the accuracy or completeness of this information and it is the customers responsibility to determine the suitability of Mitsubishi Chemical Advanced Materials products in any given application. Ertalyte Ketron Proteus Semitron and Techtron are a registered trademarks of the Mitsubishi Chemical Advanced Materials group of companies. Design and content created by Mitsubishi Chemical Advanced Materials and are protected by copyright law. Copyright Mitsubishi Chemical Advanced Materials. All rights reserved. MCM NA 6I 6.12.19